3D Uniformity App

What

  • Visualize spatial variations in thickness and film composition on 3D coated parts.
  • Decide optimum deposition time and conditions for a new part geometry.
  • Maximize loading of batch coaters by finding optimum part spacing.
  • Positive ROI is reached after the app saves 20-25 trial-and-error depositions!

How

  • Hybrid algorithm based on fluid and kinetic description of plasma.
  • Supports DC/MF sputter, arc, HiPIMS, and even PECVD coating
  • Applicable also to etch applications.
  • Supports direct import of part geometries from CAD.
  • Simulates multiple parts at the same time and their interactions in the coater.
  • Out-of-the-box support for part translation / rotation within the coater.

MatSight 3D Uniformity Use Cases

Compare the coverage of bipolar plate channels in three processes to find optimum process time. Material, pressure, and power are identical, yet uniformity completely different. (120 core-hours, 3.3 hours on 36-core)

Find the ideal part spacing for a part (bevel gear) with 2-axis rotation. This example simulates arc-grown TiN, but rotation supported for all process types. (160 core-hours, 4.4 hours on 36-core)

Find the ideal part spacing for a part (bevel gear) with 2-axis rotation. This example simulates arc-grown TiN, but rotation supported for all process types. (360 core-hours, 10 hours on 36-core)