Global Model App

What

  • Simulation of multidomain dynamic systems where plasma is the key component.
  • Perform fast high-level investigations, taking into account the process as such as well as peripheries – cooling, power supply characteristics, heater characteristics, …
  • Predict metal ionization degree and argon implantation in HiPIMS.
  • Transfer a proof-of-concept process from an R&D coater to a mass-production coater.
  • Investigate the energy efficiency and precursor utilization efficiency in PECVD processes.

How

  • Fast ODE-based simulation algorithm.
  • Geometrical factors (plasma volume, redeposition fraction) are either assumed or obtained from other MatSight Apps.
  • Additional components of the dynamic system are simply included as additional ODEs.
  • Computation times are very fast – 10 seconds to 1 minute per DoE point.
  • All expressions are contained in a human-readable physics configuration file.

MatSight Global Model App Example

Analyze the efficiency of an industrial PECVD process. We see that depending on the precursor flow rate and input power, there is not a simple trend with respect to substrate heating.

There is also a distinct optimum for the energy cost of the deposition process.