Large Scale App

What

  • Design fixtures to reduce thickness variation in inline and roll-to-roll coaters (+-1% a realistic goal)
  • Reduce top-middle-bottom thickness variation in drum coaters and batch coaters.
  • Allows you to maintain constant deposition rate over target lifetime by tuning cathode distance/tilt angle/power/current
  • “Instant ROI” is achieved by saving months of laboratory trials when developing a new coater or upscaling an existing one.

How

  • Kinetic treatment of sputtered particles traveling between the cathode and the substrate.
  • Requires cathode erosion profile – measured or loaded from the Target Erosion App
  • Currently supports DC/MF/HiPIMS sputter PVD.
  • Supports flat or curved substrates.
  • Allows import of arbitrary-shaped shields (STEP/STL/parametric) for uniformity improvement.
  • Out-of-the-box support for substrate motion

MatSight Large Area Use Cases

Predict thickness distribution on a moving substrate based on the racetrack, cathode position, material, pressure, … Below, we simulate silver sputtering in Ar atmosphere, we aim for +- 1% thickness uniformity. (16 cm coating zone)