Target Erosion App

What

  • Improve target utilization by optimizing the magnetic field (up to 20% less waste achieved)
  • Reduce material waste by shaping the target (up to 30% less waste achieved)
  • Prolong sputter target lifetime by reducing cross-corner effect (lifetime increase +40% achieved)
  • Make process more robust by understanding the effect of pressure, power, and gas composition on the erosion groove.
  • If the App improves your Cr-target lifetime or utilization by 20%, you get positive ROI after running through ca 30 targets

How

  • Highly optimized, Monte-Carlo-based algorithm predicting motion of charged particles near sputter targets.
  • Tailored for realistic high-power setups (1, 10, 20, … kW)
  • Successfully applied to 3” magnetrons as well as 4-meter sputter cathodes.
  • Supports circular, rectangular, and rotary cathodes out-of-the-box.
  • Works with direct import of CAD components (STL, STEP)

MatSight Target Erosion Use Cases

What is the erosion in a dual rotary magnetron component at 10 kW? Investigate the sensitivity to gas pressure, power, composition and magnetic field

(gas pressure) There is a “tiny” change of 4 % in the erosion uniformity … but this actually shortens your target lifetime by the same 4%!

(magnetic field) By tweaking the magnetic field, we suppress over-erosion and increase lifetime by ca 15%!